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[Submitted on 10 Sep 2026]
Abstract:Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison and machine-actionable reuse. We present four domain-expert-reviewed JSON Schemas for ALD and ALE experimental and simulation processes. Curated with schema-miner and grounded in QUDT using schema-miner pro, the schemas structure materials, process conditions, configurations , and measured or predicted results. We compare their scope, structure, and semantic grounding, and demonstrate their use for schema-guided literature extraction and publication of structured records through ORKG templates.
Submission history
From: Sameer Sadruddin [view email]
[v1]
Thu, 10 Sep 2026 19:17:41 UTC (68 KB)
추출 본문 · 출처: arxiv.org · https://arxiv.org/abs/2609.12139